O
Onto Innovation
ONTO · HBM & Packaging
$304.73
-14.59 (-4.57%)
As of Jul 15, 2026 close
Executive Compensation — FY2025 Proxy
DEF 14A filed Apr 6, 2026CEO Total Comp
$7.8M
Michael P. Plisinski · FY2025
YoY Change
+12.2%
FY2024: $7.0M
CEO Pay Ratio
63:1
median employee $123.9K
Named Executives
6
CEO · President · CFO · CFO · President · COO
Equity Share of Comp
82%
of CEO total
Compensation Over Time
CEO total by component · from Summary Compensation TableSalaryCash BonusEquity AwardsAll Other
“All Other” includes non-equity incentive compensation (see table below for the breakout).
Summary Compensation Table
Officer × year · extracted from DEF 14A · analyst-reviewed| Name & Position | Year | Salary | Cash Bonus | Equity Awards | Non-Equity Incentive | All Other | Total |
|---|---|---|---|---|---|---|---|
Michael P. Plisinski Chief Executive Officer | 2025 | $762,461 | $1,000 | $6,428,679 | $611,002 | $10,409 | $7,813,551 |
| 2024 | $729,615 | — | $5,303,695 | $920,073 | $8,383 | $6,961,766 | |
| 2023 | $692,718 | — | $4,327,136 | $624,741 | $1,433 | $5,646,028 | |
Ido Dolev Executive Vice President, Product Solutions Group | 2025 | $457,296 | $243,852 | $3,259,854 | $208,523 | $161,146 | $4,330,671 |
Brian K. Roberts Chief Financial Officer | 2025 | $272,596 | $250,000 | $2,200,083 | $325,766 | $6,433 | $3,054,878 |
Mark R. Slicer Former Senior Vice President, Chief Financial Officer | 2025 | $225,813 | — | $814,519 | — | $1,889,270 | $2,929,602 |
| 2024 | $463,500 | — | $922,402 | $336,779 | $7,530 | $1,730,211 | |
| 2023 | $461,942 | — | $834,971 | $237,287 | $10,590 | $1,544,790 | |
Shirley Chen Senior Vice President, Customer Success | 2025 | $224,192 | — | $1,350,077 | $236,738 | $5,394 | $1,816,401 |
Ramil Yaldaei Chief Operating Officer | 2025 | $387,783 | — | $1,043,702 | $226,281 | $11,478 | $1,669,244 |
| 2024 | $362,977 | — | $749,649 | $289,153 | $11,105 | $1,412,884 | |
| 2023 | $310,961 | — | $475,049 | $159,982 | $10,019 | $956,011 |
Pay vs Performance
Compensation actually paid vs TSR · XBRL (Item 402(v))CEO comp actually paidAvg other NEOTSR (indexed, right)
Pay vs Performance — Detail
| FY | CEO Paid | Avg NEO Paid | TSR | Net Income |
|---|---|---|---|---|
| 2025 | $6.5M | $4.0M | 331.8 | $136.8K |
| 2024 | $10.1M | $1.9M | 350.3 | $201.7K |
| 2023 | $21.2M | $2.8M | 321.4 | $121.2K |
| 2022 | $2.1M | $712.0K | 143.2 | $223.3K |
| 2021 | $14.0M | $2.1M | 212.9 | $142.3K |
TSR = value of $100 invested at the earliest disclosed fiscal year end · “actually paid” per SEC 402(v) methodology · source filing
Summary Compensation Table extracted from SEC DEF 14A proxy statements (Claude-assisted, analyst-reviewed before publication; source quotes pinned per figure). Pay-versus-performance from Inline XBRL (ECD taxonomy) with HTML fallback where issuer tagging is incomplete. Updated annually on proxy filing (~120 days after fiscal year end).